发明名称 Closed-Space Annealing Process for Production of CIGS Thin-Films
摘要 In one embodiment, a method includes depositing a CIGS precursor layer onto a substrate, introducing a source-material layer into proximity with the precursor layer, where the source-material layer includes one or more of Cu, In, or Ga, and one or more of S or Se, and annealing the precursor layer in proximity with of the source-material layer, where the annealing is performed in a constrained volume, and where the presence of the source-material layer reduces decomposition of volatile species from the precursor layer during annealing.
申请公布号 US2013217214(A1) 申请公布日期 2013.08.22
申请号 US201213467789 申请日期 2012.05.09
申请人 MUNTEANU MARIANA RODICA;MURALI AMITH KUMAR;BARTHOLOMEUSZ BRIAN JOSEF;CHAWLA VARDAAN;AQT SOLAR, INC. 发明人 MUNTEANU MARIANA RODICA;MURALI AMITH KUMAR;BARTHOLOMEUSZ BRIAN JOSEF;CHAWLA VARDAAN
分类号 H01L21/20;C23C16/44;C23C16/56 主分类号 H01L21/20
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