发明名称 |
BLOCK COPOLYMER AND METHOD RELATED THERETO |
摘要 |
PROBLEM TO BE SOLVED: To provide a block copolymer composition, and to provide a patterned substrate treated with the same.SOLUTION: A block copolymer composition containing a diblock copolymer blend includes: a first poly(methyl methacrylate)-b-poly((trimethylsilyl)methyl methacrylate) diblock copolymer; and a second poly(methyl methacrylate)-b-poly((trimethylsilyl)methyl methacrylate) diblock copolymer. |
申请公布号 |
JP2013163810(A) |
申请公布日期 |
2013.08.22 |
申请号 |
JP20130020120 |
申请日期 |
2013.02.05 |
申请人 |
ROHM & HAAS ELECTRONIC MATERIALS LLC;DOW GLOBAL TECHNOLOGIES LLC |
发明人 |
CHANG SHIH-WEI;GINZBURG VALERIY;VOGEL ERIN;MURRAY DANIEL;TREFONAS PETER;HUSTAD PHILLIP |
分类号 |
C08L53/00;C08F220/28;C08F297/02;C08J7/00 |
主分类号 |
C08L53/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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