发明名称 BLOCK COPOLYMER AND METHOD RELATED THERETO
摘要 PROBLEM TO BE SOLVED: To provide a block copolymer composition, and to provide a patterned substrate treated with the same.SOLUTION: A block copolymer composition containing a diblock copolymer blend includes: a first poly(methyl methacrylate)-b-poly((trimethylsilyl)methyl methacrylate) diblock copolymer; and a second poly(methyl methacrylate)-b-poly((trimethylsilyl)methyl methacrylate) diblock copolymer.
申请公布号 JP2013163810(A) 申请公布日期 2013.08.22
申请号 JP20130020120 申请日期 2013.02.05
申请人 ROHM & HAAS ELECTRONIC MATERIALS LLC;DOW GLOBAL TECHNOLOGIES LLC 发明人 CHANG SHIH-WEI;GINZBURG VALERIY;VOGEL ERIN;MURRAY DANIEL;TREFONAS PETER;HUSTAD PHILLIP
分类号 C08L53/00;C08F220/28;C08F297/02;C08J7/00 主分类号 C08L53/00
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