| 摘要 |
PROBLEM TO BE SOLVED: To provide a vacuum drying apparatus that can reduce mixing of moisture to recover a solvent while decompression-drying a coating liquid on a substrate, and a vacuum drying method.SOLUTION: A vacuum drying apparatus 1 includes: a chamber 2 for accommodating a substrate W; an exhaust device 3 for exhausting a gas in the chamber 2; a recovery device 4 for cooling a gas to recover a liquid generated by cooling; and first piping 5 that connects the chamber 2 to the exhaust device 3 via the recovery device 4 on the way. The vacuum drying apparatus decompression-dries a coating liquid R applied on the substrate W by making the exhaust device 3 exhaust the gas in the chamber 2 through the first piping 5 to perform decompression. The solvent is recovered by liquefying the solvent evaporated from the coating liquid R through decompression drying to be cooled by the recovery device 4. Second piping 6 is further provided that connects the chamber 2 with the exhaust device 3 not by way of the recovery device 4 on the way. |
