| 摘要 |
A gas mixer has at least two mass flow controllers which can control the gas mass flow rate of a gas line. A control unit is connected to the mass flow controllers to control the gas mass flow rate through each of the gas lines. Each mass flow controller has a volume counter, and the control unit is provided with a volume signal for each gas line. A method of controlling a gas mixer is provided in which a target value for the gas mass flow rate is predefined for a plurality of mass flow controllers each associated with a gas line. The ratio of the volumes that have flowed through the mass flow controllers up to now of the gases to be mixed are taken into account in determining the target values for the gas mass flow rate.
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