| 摘要 |
In the present invention, a piezoelectric resonator is provided with the following: a base; a first support part fixed to the base; a beam fixed to the first support part; an anchor fixed to the beam; a drive part provided above the beam; and a magnet for adjustment that can move on the main surface of the base. In addition, the anchor is formed of a magnet or a magnetic body, and the beam extends in a direction along the main surface of the base. This configuration enables easy adjustment of resonant frequency shift that occurs due to fluctuations in the manufacturing process. Even in a case where the resonant frequency shifts from a desired resonant frequency due to fluctuations in the manufacturing process for a power-generating element, it is possible to easily perform adjustment and obtain the maximum efficiency. |
