| 摘要 |
PROBLEM TO BE SOLVED: To provide a ball screw abnormality diagnostic device capable of performing an abnormality existence/absence diagnosis and abnormality part specification of a ball screw with high accuracy, and a ball screw abnormality diagnostic method.SOLUTION: A vibration of a ball screw 10 is detected and outputted as a vibration signal, a rotational speed of a screw shaft 11 of the ball screw 10 is also detected and outputted as a rotational speed detection signal. When controlling the operation of the ball screw 10, a normal operation pattern in which the ball screw 10 normally operates in a mechanical plant is switched to an abnormality diagnosis operation pattern in which the ball screw 10 is diagnosed to have abnormality by an abnormality diagnostic part 24 to control the operation of the ball screw 10, and an abnormality diagnosis algorithm is executed when the abnormality diagnosis operation pattern is executed. Thus, an abnormality existence/absence diagnosis and abnormality part specification of the ball screw 10 can be performed with high accuracy. |
