| 摘要 |
PURPOSE: A probe structure including a plurality of blocks is provided to measure an electrical characteristic of a measurement target subject with distance of less than 30 micrometer between terminals. CONSTITUTION: A base block(110) includes a first face(111) facing a measurement target subject and a second face(112). A probe support block includes a third face(121) engaging with the first face of the base block and a fourth face(122) engaging with the second face of the base block, and a plurality of first slots(124) to accommodate probes in the opposite face of the third face and the fourth face are formed. A probe(140) includes a first arm(141) inserted into the first slot in the opposite side of the third face. A first terminal(143) is connected to a measurement apparatus while being formed in the end of the first arm. A second terminal(144) is formed to contact with the measurement target subject while being formed in the end of the second arm. |
