FORMATION METHOD OF CONTACT HOLE PATTERN

摘要

PROBLEM TO BE SOLVED: To provide a method for improving uniformity and circularity of the hole diameter of a contact pattern.SOLUTION: A method comprises: a block copolymer layer formation step of forming a layer 5 comprising a block copolymer, where a plurality of blocks are bonded, on a substrate 1 having a thin film 4 with a formed hole pattern on a surface so that the above thin film is covered; a phase separation step of phase separation of a layer comprising the above block copolymer; and a selective remove step of selectively removing a phase consisting of at least one kind of a plurality of blocks composing the above block copolymer in the layer comprising the above block copolymer, where the hole diameter of the hole pattern formed on the above thin film is 0.8 to 3.1 times the cycle of the block copolymer. In the above layer formation step, the thickness from the top face of the above thin film to the surface of the layer comprising the above block copolymer is 70% or less of the thickness of the above thin film.