PRECURSOR EVAPORATORS AND METHODS OF FORMING LAYERS USING THE SAME

摘要

An evaporator includes a main body, an evaporation space therein, a precursor inlet through which a precursor is provided into a portion of the first evaporation space, a carrier gas inlet through which a carrier gas is provided thereinto, and an outlet through which the precursor is emitted. The evaporation space includes a first evaporation space and a second evaporation space in communication therewith. The first evaporation space has a conical shape portion and the second evaporation space has a cylindrical shape portion. The portion of the first evaporation space into which the precursor is provided corresponds to an apex of the conical shape portion. The carrier gas inlet penetrates the main body in a substantially tangential direction with respect to a sidewall of the first evaporation space at the conical shape portion. The outlet is in fluid communication with an end portion of the second evaporation space.