| 摘要 |
PROBLEM TO BE SOLVED: To provide an acceleration sensor which has low power consumption and excellent operation accuracy.SOLUTION: An acceleration sensor 1 comprises: a first support substrate 8 and a second support substrate 9; a frame part 2; a fixed electrode 7 whose upper and lower surfaces are fixed to the first support substrate 8 and the second support substrate 9 and whose surface is at least partially constituted of a conductive material; a movable electrode 3; a spring part 4 which is arranged so as to surround the peripheral surface of the movable electrode 3 and rotatably holds the movable electrode 3; a frame connection part 5 which connects one end of the spring part 4 to the inner peripheral surface of the frame part 2 and whose surface is at least partially constituted of a conductive material; and a movable electrode connection part 6 which connects the other end of the spring part 4 to the outer peripheral surface of the movable electrode 3 and whose surface is at least partially constituted of a conductive material. At least one of the frame connection part 5 and the movable electrode connection part 6 is thicker than the spring part 4. |
