SEMICONDUCTOR PROCESSING SYSTEM, SEMICONDUCTOR DEVICE MANUFACTURING METHOD, DEVICE DATA COLLECTING METHOD, CONTROL PROGRAM, AND READABLE STORAGE MEDIUM

摘要

[Problem] To efficiently extract the feature values of steps and to precisely and easily extract the feature values of steps even if there has been any recipe change such as step addition/deletion or the like. [Solution] There are included: a semiconductor processing unit (3) that performs a film formation on a processing condition that has been established; a device status data collecting unit (4) that collects device status data from the semiconductor processing unit (3); and a data analyzing unit (5) that extracts predetermined feature values and performs a data analysis on the basis of the device status data that matches a condition definition file used as section definition information in which one or more compilation sections have been individually established for a plurality of steps on the processing recipe of the semiconductor processing unit (3).