发明名称 |
EXPOSURE APPARATUS AND METHOD OF CONFIGURING EXPOSURE APPARATUS |
摘要 |
A light exposer according to an embodiment of the present invention includes an exposure beam generator generating an exposure beam, and a vacuum chamber passing the exposure beam generated by the exposure beam generator and including a first fly eye lens having a plurality of convex lens like fly eyes. The exposure beam generator includes an oscillator including an oscillator pumping chamber, a first prism and a second prism, and a first exposure beam diameter changing lens positioned before the first prism and enlarging a diameter of the exposure beam.
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申请公布号 |
US2013215405(A1) |
申请公布日期 |
2013.08.22 |
申请号 |
US201213615299 |
申请日期 |
2012.09.13 |
申请人 |
TORIGOE TSUNEMITSU;KIM CHANG HOON;SEO KAB JONG;SAMSUNG DISPLAY CO., LTD. |
发明人 |
TORIGOE TSUNEMITSU;KIM CHANG HOON;SEO KAB JONG |
分类号 |
G03B27/54 |
主分类号 |
G03B27/54 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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