发明名称 APPARATUS FOR INSPECTING DISPLAY CELLS
摘要 PURPOSE: An OLED cell inspection method and an apparatus thereof are provided to reduce the defect rate of an OLED apparatus and to improve productivity by inspecting a plurality of OLED cells formed on a motherboard before the encapsulation of the OLED cells. CONSTITUTION: A display cell inspection apparatus (100) includes a probe card cassette which holds a plurality of probe cards by stacking the probe cards, a probe card transfer unit which selects one of the probe cards and transfers the selected probe card, a clamping unit which fixes the probe card which is transferred by the probe card transfer unit, a stage (122) which faces the probe card fixed by the clamping unit, supports a substrate on which display cells are formed, and moves to connect the probes of the probe card and the display cells, and an inspection unit (132) which applies an inspection signal to the display cells through the probes by being connected to the probe card fixed by the clamping unit, and inspects the electrical characteristics of the display cells.
申请公布号 KR20130093258(A) 申请公布日期 2013.08.22
申请号 KR20120014692 申请日期 2012.02.14
申请人 SEMES CO., LTD. 发明人 JIN, JEON HO;EO, KYOUNG HO
分类号 G01R31/28;H01L51/56 主分类号 G01R31/28
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