发明名称 COMPOSITION FOR PHOTOCURABLE IMPRINT, AND METHOD FOR FORMATION OF PATTERN USING THE COMPOSITION
摘要 <p>Disclosed is a photocurable composition for imprint which has good pattern-transferring property and good detachability from mold (pattern formation surface) regardless of the type of polymerizable monomer to be used, whereby it is possible to form a pattern having a shape with excellent reproducibility; and a method for forming a pattern on a substrate by photoimprint using the composition. The photocurable composition for imprint includes (A) polymerizable monomer having (meth)acrylic group, (B) photoinitiator, and (C) hyperbranched polymer obtained by polymerizing polymerizable monomer having (meth)acrylic group. Preferably, the composition includes 0.1-10 parts by mass of the photoinitiator (B) and 0.1-10 parts by mass of the hyperbranched polymer (C) relative to 100 parts by mass of the polymerizable monomer (A).</p>
申请公布号 KR20130093590(A) 申请公布日期 2013.08.22
申请号 KR20137001263 申请日期 2011.06.29
申请人 TOKUYAMA CORPORATION 发明人 UMEKAWA HIDEKI;KAWABATA YUICHIRO
分类号 H01L21/027;B29C59/02;G03F7/20 主分类号 H01L21/027
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