| 摘要 |
PROBLEM TO BE SOLVED: To provide a measuring instrument for enabling highly accurate shape measurement of a specimen by performing temperature management of the specimen.SOLUTION: A measuring instrument for measuring the shape of a specimen M includes shape measurement means comprising a shape sensor 20 for measuring a three-dimensional shape of the specimen M, an infrared camera 30 for measuring the temperature of the specimen M, a temperature measurement part comprising a temperature measurement circuit, and a control part for changing the existence/absence of execution of measurement by the shape measurement means or contents to be outputted together with measurement information obtained by the shape measurement means. |
