| 摘要 |
PROBLEM TO BE SOLVED: To provide a pressure sensor module for enabling a temperature sensor part to accurately measure the temperature of a pressure sensor, and accordingly, capable of outputting an accurate pressure value by properly performing temperature correction even when a temperature compensation part and a pressure sensor device part are made to be two chips in a temperature compensation type pressure sensor.SOLUTION: A pressure sensor module of the present invention includes at least a pressure sensor device having a pressure detection part, and a temperature compensation device having a temperature measurement part to compensate an output value of the pressure sensor device on the basis of a measurement value of the temperature measurement part. In the pressure sensor module, a heat transfer pad is provided on the top surface of the pressure sensor device, and the heat transfer pad and the temperature measurement part are thermally connected through a heat transfer line. |
