ONLINE ADJUSTABLE MAGNET BAR

摘要

The present invention provides an end-block (100) for rotatably carrying a sputtering target tube (200) and for rotatably restraining a magnet bar inside said sputtering target tube. The end-block (100) comprises a receptacle for receiving a magnet bar fitting (150), wherein said receptacle comprises a first part (162) of a signal connector arranged to receive a second part (164) of a signal connector from said magnet bar fitting (150),and allowing a signal connector between the end-block (100) and the magnet bar (220) to be formed. The end-block is adapted for providing protection means to the signal connector for protecting it from degradation, destruction or interference of a power and/or data signal transmitted between the end-block and the magnet bar, due to surrounding cooling fluid and/or surrounding high energy fields. The present invention also provides a corresponding magnet bar, and a method for adjusting a magnetic configuration of a magnet bar in a cylindrical sputtering apparatus.