| 摘要 |
A micro optical device 10 comprises a body 12. The body comprises a movable member 14, which is moveable relative to another part 26 of the body. An optical element, such as an optical source 16, is provided on or within the movable member. The moveable member may be subjected to a parameter, such as mass, to be sensed and by monitoring at detector 22 changes of an optical signal emitted by the optical source, the parameter may be monitored.
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