发明名称 PRESSURE SENSOR HAVING A NANO STRUCTURE AND MANUFACTURING METHOD THEREOF
摘要 <p>The present disclosure relates to a pressure sensor having a nanostructure and a method for manufacturing the same. More particularly, it relates to a pressure sensor having a nanostructure attached on the surface of the pressure sensor and thus having improved sensor response time and sensitivity and a method for manufacturing the same. The pressure sensor according to the present disclosure having a nanostructure includes: a substrate; a source electrode and a drain electrode arranged on the substrate with a predetermined spacing; a flexible sensor layer disposed on the source electrode and the drain electrode; and a nanostructure attached on the surface of the flexible sensor layer and having nanosized wrinkles.</p>
申请公布号 KR101299133(B1) 申请公布日期 2013.08.22
申请号 KR20110128939 申请日期 2011.12.05
申请人 发明人
分类号 G01L9/00 主分类号 G01L9/00
代理机构 代理人
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