| 摘要 |
Disclosed herein are various methods of forming isolation structures, such as trench isolation structures, for semiconductor devices. In one example, the method includes forming a trench in a semiconducting substrate, forming a lower isolation structure in the trench, wherein the lower isolation structure has an upper surface that is below an upper surface of the substrate, and forming an upper isolation structure above the lower isolation structure, wherein a portion of the upper isolation structure is positioned within the trench.
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