Device for contact-less and precise movement of component of projection exposure system for microlithography, has air bearing, with which component is lifted by air pressure by upper surface to be moved relative to upper surface

摘要

The device has an air bearing (3), with which a component (1) is lifted by air pressure by an upper surface (2) to be moved relative to the upper surface. A lifting unit (4) is arranged to the air bearing, so that the component is raised relative to the air bearing and independent of the air bearing in a movable manner. Two, particularly three or multiple air bearings are provided with the lifting unit in a combined manner. The air bearing has a base element (5), between which and the upper surface the air pressure is formed for lifting the component from the upper surface. An independent claim is included for a method for operating a device for contact-less and precise movement of a component.