SUBSTRATE PROCESSING MODULE AND SUBSTRATE PROCESSING APPARATUS INCLUDING SAME

摘要

According to one embodiment of the present invention, a substrate processing module includes: a lower chamber having an open upper portion having a passage formed on one side thereof for the introduction of substrates; a plurality of susceptors disposed inside the lower chamber and fixedly and circumferentially arranged about a preset center such that the respective substrates can be laid thereon during processing; a rotating member disposed at the center so as to be rotatable about the center; a plurality of holders, each of which is connected to the rotating member so as to rotate with the rotating member, wherein each holder has at least one seating surface on which the respective substrate is laid; and a driving module connected to the rotating member so as to drive the rotating member and move one of the holders to a delivery position corresponding to the passage.