发明名称 TECHNIQUES FOR HANDLING MEDIA ARRAYS
摘要 <p>Techniques for handling media arrays are disclosed. The techniques may be realized as a system for handling a plurality of substrates. The system may comprise a plurality of row elements for supporting the plurality of substrates, wherein the plurality of row elements may be operable to change configuration of the substrates from open configuration to a high-density configuration, where a distance between adjacent substrates in the open configuration may be greater than a distance between the adjacent substrates in the high-density configuration.</p>
申请公布号 WO2013122779(A1) 申请公布日期 2013.08.22
申请号 WO2013US24754 申请日期 2013.02.05
申请人 VARIAN SEMICONDUCTOR EQUIPMENT ASSOCIATES, INC. 发明人 FORDERHASE, PAUL;BLAKE, JULIAN;WEAVER, WILLIAM
分类号 H01L21/67;H01L21/673;H01L21/677 主分类号 H01L21/67
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