| 摘要 |
<p>PURPOSE: A handler and a device for inspecting components are provided to increase loads relative to a control of a control unit controlling a temperature of the component and to suppress the complication of a coolant circuit after a plurality of support units is cooled. CONSTITUTION: A handler comprises a first cooled reactor (67A) cooling a first support unit supporting components by refrigerant; second cooled reactors (67B, 67C, 67D) cooling a second support unit which is different from the first support unit while supporting the component; a first heater heating the first support unit; a second heater which is different from the first heater while heating the second support unit; a first temperature sensor detecting a temperature of the first support unit; a second temperature sensor which is different from the first temperature sensor and detects the temperature of the second support unit; and a refrigerant supply unit supplying the refrigerant through a flow control valve in the first and second cooled reactor. The first and second cooled reactor are connected in parallel relative to the refrigerant supply unit, change an output of the opening and closing valves of the flow control valve and the first heater according to a detected value of the first temperature sensor, and include a control unit changing an output of the second heater according to a detected value of the second temperature sensor. [Reference numerals] (AA) To a different cooling unit</p> |
