发明名称 |
EXPOSURE APPARATUS, EXCHANGE METHOD OF OBJECT, EXPOSURE METHOD, AND DEVICE MANUFACTURING METHOD |
摘要 |
<p>A first carrier unit carries out a substrate tray that supports a substrate from below from a substrate holder by sliding the substrate tray in one axis direction (Y-axis direction) parallel to the substrate surface. Meanwhile, a second carrier unit carries in a substrate tray that supports a substrate subject to carry-in from below onto the substrate holder by sliding the substrate tray in the Y-axis direction, in parallel with the carry-out operation of the substrate (in a state where a part of the substrate tray that supports the substrate subject to carry-out is located on the substrate holder). Consequently, exchange of the substrate on the substrate holder can speedily be performed.</p> |
申请公布号 |
KR20130093482(A) |
申请公布日期 |
2013.08.22 |
申请号 |
KR20127028817 |
申请日期 |
2011.03.10 |
申请人 |
NIKON CORPORATION |
发明人 |
AOKI YASUO |
分类号 |
H01L21/677;B65G49/06;G03F7/20 |
主分类号 |
H01L21/677 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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