PHOTO-CURED PRODUCT AND METHOD FOR PRODUCING THE SAME

摘要

PROBLEM TO BE SOLVED: To provide a photo-cured product prepared using an optical imprint method, good in pattern accuracy and improved in pattern defects.SOLUTION: A photo-cured product is obtained by performing light irradiation while a coating film is brought into contact with a mold. The photo-cured product contains a fluorine atom-containing surfactant. Among secondary ion signals obtained by surface analysis of the photo-cured product by a time-of-flight secondary ion mass spectrometry method, the signal strength of a CHOion is greater than that of a CHOion.