发明名称 Method for Monitoring Flexural Vibrations of a Piezoactuator
摘要 In the method for monitoring flexural vibrations of a piezoactuator, a small-signal spectrum of a piezoactuator, which is provided and mounted for the purpose of exciting longitudinal vibrations, is measured and an excitation of a transverse vibration in the piezoactuator is detected from resonances occurring in the small-signal spectrum.
申请公布号 US2013212848(A1) 申请公布日期 2013.08.22
申请号 US201113813341 申请日期 2011.09.02
申请人 GABL REINHARD;EPCOS AG 发明人 GABL REINHARD
分类号 H01L41/25;G01R29/22 主分类号 H01L41/25
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