发明名称 |
BOAT FOR LOADING SEMICONDUCTOR SUBSTRATES |
摘要 |
Provided is a boat for loading semiconductor substrates that includes a top plate and a bottom plate separated from each other, a rod extending from the bottom plate to the top plate and disposed between the top plate and the bottom plate, a plurality of buffer plates disposed between the top plate and the bottom plate and separated from each other by a first distance along a lengthwise direction of the rod, and a support provided between a first buffer plate and a second buffer plate which neighbor each other and supporting a loaded semiconductor substrate.
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申请公布号 |
US2013213910(A1) |
申请公布日期 |
2013.08.22 |
申请号 |
US201213671989 |
申请日期 |
2012.11.08 |
申请人 |
SAMSUNG ELECTRONICS CO., LTD.;SAMSUNG ELECTRONICS CO., LTD. |
发明人 |
KANG SUNG-HO;KUH BONG-JIN;KIM KI-SEOK;KIM KI-CHUL;KIM IK-SOO;JOO YONG-KYU;HA SANG-CHEOL |
分类号 |
H01L21/683 |
主分类号 |
H01L21/683 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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