发明名称 |
METHOD FOR PURGING A SUBSTRATE CONTAINER |
摘要 |
A method for purging a substrate container which accommodates in multiple stages a plurality of substrates to be processed by a substrate processing apparatus, the method includes: mounting the substrate container on a mounting unit; connecting a gas supply port provided in the substrate container and a gas supply line provided in a mounting unit; starting supply of a dry gas into the substrate container from a gas supply line before opening a cover of the substrate container; opening the cover of the substrate container while keeping the supply of the dry gas; closing the cover of the substrate container upon completion of processing of the substrates in the substrate container; and stopping the supply of the dry gas after closing the cover of the substrate container.
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申请公布号 |
US2013213442(A1) |
申请公布日期 |
2013.08.22 |
申请号 |
US201313757954 |
申请日期 |
2013.02.04 |
申请人 |
TOKYO ELECTRON LIMITED;TOKYO ELECTRON LIMITED |
发明人 |
KAISE SEIICHI;AMEMIYA SHIGEKI;ONODERA SHINOBU;FUJITA HIROKI;NISHINO MASARU;RIKUKAWA ATSUSHI |
分类号 |
H01L21/677 |
主分类号 |
H01L21/677 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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