发明名称 IMAGE-FORMING DEVICE, AND DIMENSION MEASUREMENT DEVICE
摘要 The objective of the present invention is to provide an image-forming device and the like that enable the formation of an appropriate integrated signal, even when obtaining an image or a signal waveform of a pattern which can be difficult to appropriately match, such as a repeating pattern or a shrinking pattern. In order to achieve said objective, proposed is an image-forming device that integrates a plurality of image signals to form an integrated image, said image-forming device being provided with: a matching processing unit that carries out matching processing between the plurality of image signals; an image integration unit that integrates the plurality of image signals that have been aligned by the matching processing unit; and a periodicity determination unit that determines the periodicity of the pattern included in the image signal. The matching processing unit alters the size of the image signal region subjected to matching in accordance with the determination made by the periodicity determination unit.
申请公布号 WO2013122019(A1) 申请公布日期 2013.08.22
申请号 WO2013JP53170 申请日期 2013.02.12
申请人 HITACHI HIGH-TECHNOLOGIES CORPORATION 发明人 TAKASUGI YASUNORI;SAKAI KEI;YAMAGUCHI SATORU;HIRAO KAZUYUKI
分类号 H01J37/22;G01B15/00;G01B15/04 主分类号 H01J37/22
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