| 摘要 |
PURPOSE: A fluidized bed reactor for manufacturing granulated polysilicon is provided to reduce the precipitation of silicon on the inner wall of a fluidized bed reactor by changing the circulating direction of a fluidized bed. CONSTITUTION: A fluidized bed reactor(100) includes a wall(110), a distributing plate(130), and a heater(140). The wall forms a fluidized bed space(120). Concave parts(150) are formed on the inner wall of the reactor. The distributing plate is positioned at the lower side of the inner wall. The distribution plate injects reaction gas into the inner part of the inner wall. The heater heats the inner wall. The concave parts are continuously formed to the height direction of the inner wall. |
