发明名称 LASER BEAM MACHINING DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a laser beam machining device equipped with a dust discharging unit, in which dust generated by an abrasion processing does not disturb the light path of a laser beam.SOLUTION: A laser beam machining device is equipped with a dust discharging means which sucks in and discharges dust generated in the vicinity of a processing point caused by a laser beam being irradiated to a processed object, wherein the discharging mean is equipped with a first chamber which generates air flow flowing from a condenser side to the processing point side in the circumference of the laser beam passing through the interior and prevents the duct from heading to the condenser side, and a second chamber which sucks in and exhausts the dust, being communicated with the lower end of the first chamber. In the second chamber, a flow path branch portion is arrangedly provided, which branches the flow path of the dust heading to a suck-in/exhaust path through a bottom portion opening from the processing point into a first flow path and a second flow path in the both side direction of a processing groove centered at the laser beam.
申请公布号 JP2013163215(A) 申请公布日期 2013.08.22
申请号 JP20120028652 申请日期 2012.02.13
申请人 DISCO CORP 发明人 YOSHII SHUNGO
分类号 B23K26/14;B23K26/00;B23K26/36;H01L21/301 主分类号 B23K26/14
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