| 摘要 |
PROBLEM TO BE SOLVED: To obtain an atmospheric microwave plasma needle generator in which thermal damage due to plasma can be prevented by generating plasma on the outside of a coaxial waveguide, and a large temperature adjustment range of plasma is ensured.SOLUTION: A microwave generator (1) is provided with a coaxial waveguide (10) formed by fitting an inner conductor (12) to the axial part of a cylindrical outer conductor (11) coaxially therewith. The inner conductor (12) is connected with a conductive antenna (13), and the antenna (13) is exposed from the outer conductor (11) to the outside. Gas for plasma generation supplied by a gas supply device (20) is ejected toward the exposed end of the antenna (13). The antenna (13) is extended in the axial direction of the inner conductor (12) and exposed from the outer conductor (11) to the outside. The exposure (H1) is set equal to or smaller than 1/4 of the wavelength of microwave, and the power of the microwave generator (1) is set to 2.5-10 W. |
