发明名称 |
METHOD OF FABRICATION POLYMER WAVEGUIDE |
摘要 |
A method of fabricating a waveguide device is disclosed. The method includes providing a substrate having an elector-interconnection region and a waveguide region and forming a patterned dielectric layer and a patterned redistribution layer (RDL) over the substrate in the electro-interconnection region. The method also includes bonding the patterned RDL to a vertical-cavity surface-emitting laser (VCSEL) through a bonding stack. A reflecting-mirror trench is formed in the substrate in the waveguide region, and a reflecting layer is formed over a reflecting-mirror region inside the waveguide region. The method further includes forming and patterning a bottom cladding layer in a wave-tunnel region inside the waveguide region and forming and patterning a core layer and a top cladding layer in the waveguide region.
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申请公布号 |
US2013216177(A1) |
申请公布日期 |
2013.08.22 |
申请号 |
US201213399098 |
申请日期 |
2012.02.17 |
申请人 |
TSENG CHUN-HAO;LEE WAN-YU;CHEN HAI-CHING;BAO TIEN-I;TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD. |
发明人 |
TSENG CHUN-HAO;LEE WAN-YU;CHEN HAI-CHING;BAO TIEN-I |
分类号 |
G02B6/122;B32B37/02;B32B38/10 |
主分类号 |
G02B6/122 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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