发明名称 METHOD AND APPARATUS OF OPERATING A SCANNING PROBE MICROSCOPE
摘要 An improved mode of AFM imaging (Peak Force Tapping (PFT) Mode) uses force as the feedback variable to reduce tip-sample interaction forces while maintaining scan speeds achievable by all existing AFM operating modes. Sample imaging and mechanical property mapping are achieved with improved resolution and high sample throughput, with the mode workable across varying environments, including gaseous, fluidic and vacuum.
申请公布号 EP2359148(A4) 申请公布日期 2013.08.21
申请号 EP20090826873 申请日期 2009.11.13
申请人 BRUKER NANO, INC. 发明人 HU, YAN;HU, SHUIQING;SU, CHANMIN
分类号 G01Q60/32;G01Q10/06 主分类号 G01Q60/32
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