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发明名称
TRACKING SPECTRUM FEATURES IN TWO DIMENSIONS FOR ENDPOINT DETECTION
摘要
申请公布号
KR20130093099(A)
申请公布日期
2013.08.21
申请号
KR20137004558
申请日期
2011.07.20
申请人
APPLIED MATERIALS, INC.
发明人
DAVID JEFFREY DRUE;HU XIAOYUAN;ZHU ZHIZE;LEE HARRY Q.
分类号
H01L21/304;B24B37/013
主分类号
H01L21/304
代理机构
代理人
主权项
地址
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