| 摘要 |
PROBLEM TO BE SOLVED: To acquire a stable amount of light received according to a work in an optical displacement gauge two-dimensionally disposed with light receiving elements. SOLUTION: This optical displacement gauge includes: a projection unit 3 for applying light to a measuring object WK; a two-dimensional light-receiving element 15 that has a light-receiving characteristic curve capable of suppressing an output signal in an area where the intensity of received light is high, without saturating it, receives reflection light from the measuring object WK and outputs it as a light-receiving signal at each position in the first direction; a light-receiving element control unit 52 for adjusting the light-receiving characteristic curve of the two-dimensional light-receiving element 15; an amplifier for amplifying the light-receiving signal from the two-dimensional light-receiving element 15 whose light-receiving characteristic curve is adjusted by the light-receiving element control unit 52; and a profile arithmetic unit 54 capable of computing a profile shape of the measuring object WK based on the amplification signal obtained by the amplifier at each point in the first direction by the reflection light of the light emitted from the projection unit 3. COPYRIGHT: (C)2012,JPO&INPIT |
