Embodiments described herein provide for an on-chip alkali dispenser. The on-chip alkali dispenser includes a monolithic semiconductor substrate defining a trench therein, and an evaporable metal material disposed in the trench. A heating element is disposed proximate the evaporable metal material and configured to provide heat to the evaporable metal material. A getter material is disposed to sorb unwanted materials released from the evaporable metal material.
申请公布号
EP2629159(A2)
申请公布日期
2013.08.21
申请号
EP20130155129
申请日期
2013.02.13
申请人
HONEYWELL INTERNATIONAL INC.
发明人
STRABLEY, JENNIFER S.;NELSON, KARL D.;COMPTON, ROBERT