发明名称 Solid-state image sensor, method of manufacturing the same and camera
摘要 <p>An image sensor includes a charge accumulation region of a first conductivity type, an isolating semiconductor region formed from an impurity semiconductor region of a second conductivity type, a channel stop region formed from an impurity semiconductor region of the second conductivity type which is located on the isolating semiconductor region, and an insulator arranged on the channel stop region. The insulator includes a first insulating portion arranged above the isolating semiconductor region via the channel stop region, a second insulating portion arranged adjacent to an outside of the first insulating portion, wherein thickness of the second insulating potion decreases with an increase in distance from the first insulating portion, and a third insulating portion formed on the first insulating portion, wherein the third insulating portion has upper and side faces connecting the upper face to an upper face of the second insulating portion. </p>
申请公布号 EP2466642(A3) 申请公布日期 2013.08.21
申请号 EP20110191868 申请日期 2011.12.05
申请人 CANON KABUSHIKI KAISHA 发明人 KAWANO, AKIHIRO
分类号 H01L27/146 主分类号 H01L27/146
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