发明名称 MANUFACTURING METHOD FOR FLEXIBLE DEVICE AND FLEXIBLE DEVICE MANUFACTURED BY THE SAME
摘要 <p>PURPOSE: A method for manufacturing a flexible device and the flexible device are provided to maintain a flexible substrate with a high alignment by bonding the flexible device to the flexible substrate after the flexible device is manufactured on a silicon substrate. CONSTITUTION: A silicon-on-insulator includes a bottom silicon layer, an insulation layer (200), and a top silicon layer (100). A device (300) is arranged on the top silicon layer. A second silicon substrate is bonded to the top silicon layer through a bonding layer. The bottom silicon layer is removed. The top silicon layer is transferred on a flexible substrate (600) by using the second silicon substrate. A passivation layer is laminated on the flexible substrate.</p>
申请公布号 KR20130092706(A) 申请公布日期 2013.08.21
申请号 KR20120014138 申请日期 2012.02.13
申请人 KOREA ADVANCED INSTITUTE OF SCIENCE AND TECHNOLOGY 发明人 LEE, KEON JAE;LEE, KWY RO;HWANG, GEON TAE;IM, DONG GU
分类号 H01L21/027;H01L27/12 主分类号 H01L21/027
代理机构 代理人
主权项
地址