发明名称 TAPE BONDING DEVICE, MOUNT DEVICE, AND MOUNT METHOD
摘要 A raw sheet L, in which a strip-shaped tape base material TB having a die bonding sheet portion DS with a size of substantially corresponding to the shape of a semiconductor wafer W is temporarily stuck to a strip-shaped release liner S, is fed out, and the position of the die bonding sheet portion DS is identified on the pathway of feeding out. Based on the identified result, a die cutting device 13 provides a closed-loop-shaped cut-line C to be encircling the die bonding sheet portion DS corresponding to the shape of the ring frame RF to form a sticking tape DDT. The sticking tape DDT is peeled by a peeling device 15 to be stuck to the ring frame RF in the position that the die bonding sheet portion DS is to be corresponding to the semiconductor wafer W.
申请公布号 KR101298496(B1) 申请公布日期 2013.08.21
申请号 KR20087011471 申请日期 2006.12.04
申请人 发明人
分类号 H01L21/60;H01L21/683 主分类号 H01L21/60
代理机构 代理人
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