| 摘要 |
PROBLEM TO BE SOLVED: To provide a straight metallic micro coil without burrs the outer diameter of which is 100 μm or less, and which satisfies length/outer diameter = aspect ratio 30 or more. SOLUTION: A resist is applied to an outer surface of a metallic micro pipe, and exposure beam is applied to spirally scanning and exposing. At this time, the inclination and height of the micro pipe is adjusted in advance to expose so that the exposure beam spot is applied by a constant shape and size all the time, and a spiral space pattern with uniform line width is formed. When etching the micro pipe using the resist as a masking material, etching is rinsed during process, and then etching is continued. An etching speed is thereby averaged and predicted, and "burrs" are removed by performing etching up to the proper timing. COPYRIGHT: (C)2009,JPO&INPIT |
