| 摘要 |
PROBLEM TO BE SOLVED: To provide an expanding device preventing non-uniform warpage of a pressurizing ring and uniformly expanding a wafer sheet. SOLUTION: The expanding device includes a fixed ring 1 and the pressurizing ring 2 disposed on an outer peripheral side of the fixed ring 1 and is constructed to lower the pressurizing ring by an elevating means 4 to push an extensible sheet S with an electronic component adhered toward the fixed ring to expand the extensible sheet S. The device includes an engaging means 16 engaging with the pressurizing ring 2 in cooperation with lowering of the pressurizing ring 2 when the pressurizing ring 2 is lowered to maintain a horizontal state of the pressurizing ring 2. COPYRIGHT: (C)2010,JPO&INPIT |
