| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for producing a component for a vacuum film deposition system which can stably and effectively prevent the peeling of a film deposition material stuck in the process of a film deposition process. SOLUTION: The method for producing a component 1 for a vacuum film deposition system includes: a step of forming a sprayed coating 3 made of a high melting point metal selected from W and Mo on the surface of a component body 2; and a step of heating the sprayed coating 3 at a temperature of 1,073-1,373K in a reducing atmosphere and performing degassing treatment while removing the oxide film present on the surface of the sprayed coating 3. In the sprayed coating after the degassing treatment, the remaining amount of the gas is controlled to ≤10 Torr.cc/g. COPYRIGHT: (C)2011,JPO&INPIT |
