发明名称 Method for forming a gettering layer
摘要 <p>The present invention is directed to a method for forming a gettering layer in a semiconductor substrate comprising: a. exposing a semiconductor substrate to an impurity containing ambient atmosphere, b. subsequently heating a surface of the semiconductor substrate at a temperature above melting temperature by means of laser irradiation.</p>
申请公布号 EP2629321(A1) 申请公布日期 2013.08.21
申请号 EP20120290054 申请日期 2012.02.14
申请人 EXCICO FRANCE 发明人 HUET, KARIM
分类号 H01L21/268;H01L21/322 主分类号 H01L21/268
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