发明名称 Gas-sensitive semiconductor device
摘要 A gas-sensitive semiconductor device having a semiconductive channel (10) which is delimited by a first (12) and a second (14) channel electrode, and having a gate electrode (16) which is associated with the channel and which cooperates with the channel in such a way that a change in conductivity of the channel (10) occurs as a response to an action of a gas. The gate electrode (16) and/or a gate insulation layer (20) which insulates the gate electrode from the channel, and/or a gate stack layer (18) which may be provided between the gate electrode and the channel have/has two surface sections (22, 24) which differ in their sensitivity to gases.
申请公布号 US8513711(B2) 申请公布日期 2013.08.20
申请号 US20100924284 申请日期 2010.09.23
申请人 KUNZ DENIS;WIDENMEYER MARKUS;MARTIN ALEXANDER;ROBERT BOSCH GMBH 发明人 KUNZ DENIS;WIDENMEYER MARKUS;MARTIN ALEXANDER
分类号 H01L21/00 主分类号 H01L21/00
代理机构 代理人
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