发明名称 |
Methods and apparatus for tuning matching networks |
摘要 |
Methods and apparatus for tuning matching networks are provided herein. A method of tuning a matching network includes providing a matching network coupling an RF source to a load, the matching network having a tunable element disposed at a first set point; increasing a value of the tunable element by a first step above the first set point; sensing a first adjusted value of a reflected RF power; decreasing the value of the tunable element by the first step below the first set point; sensing a second adjusted value of the reflected RF power; comparing the first and the second adjusted values of the reflected RF power; and moving the tunable element to a second set point that corresponds to a position having a lowest adjusted value of the reflected RF power. The method may be repeated until the reflected RF power falls within an acceptable reflected RF power range.
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申请公布号 |
US8513889(B2) |
申请公布日期 |
2013.08.20 |
申请号 |
US20100899048 |
申请日期 |
2010.10.06 |
申请人 |
ZHANG CHUNLEI;SHOJI SERGIO F.;SEMENIN ANDREY;RAMASWAMY KARTIK;CRUSE JAMES P.;LIAO BRYAN;APPLIED MATERIALS, INC. |
发明人 |
ZHANG CHUNLEI;SHOJI SERGIO F.;SEMENIN ANDREY;RAMASWAMY KARTIK;CRUSE JAMES P.;LIAO BRYAN |
分类号 |
H03H7/38 |
主分类号 |
H03H7/38 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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