| 摘要 |
PROBLEM TO BE SOLVED: To provide an ultrasonic probe including a matching layer providing conductivity by forming an electrode in the matching layer, and a manufacturing method thereof.SOLUTION: An ultrasonic probe includes a piezoelectric layer and at least one matching layer 10 which is positioned on a front face of the piezoelectric layer and in which an electrode is formed. Furthermore, when forming an internal electrode 13 within the matching layer, a plurality of kerfs 11 on one surface of the matching layer, electrodes 12, 13 are formed on the one surface of the matching layer including an inner surface of the plurality of kerfs, the plurality of kerfs are filled, and one surface side and another surface side of the matching layer are cut, thereby exposing the electrodes formed on the inner surface of the plurality of kerfs. Moreover, after the one surface side and the other surface side of the matching layer are cut so as to expose the electrodes, an external electrode 15 is further formed on the one surface and the other surface of the matching layer where the electrodes are exposed. |
