| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for controlling a slurry supply device capable of reducing the abrasion of a diaphragm valve.SOLUTION: A slurry supply device 1 includes: piping 20 connecting a slurry supply source D and a slurry supplying destination F; a pump 30 interposed in the piping 20; and a diaphragm valve 21 interposed on the discharge side of the pump 30 of the piping 20. In this method for controlling the slurry supply device 1, the pump 30 is controlled such that the flow rate during the opening/closing changeover operation of the diaphragm valve 21 becomes small compared to the flow rate when the diaphragm valve 21 is in an opened state. Because the flow rate of slurry during the opening/closing changeover operation of the diaphragm valve 21 is small, the abrasion of the diaphragm valve 21 can be reduced. |
