发明名称 |
BASE UNIT OF SEMICONDUCTOR TESTING DEVICE AND SEMICONDUCTOR TESTING DEVICE |
摘要 |
PROBLEM TO BE SOLVED: To perform stably connector fitting operation without increasing sizes of connectors in a base unit including the connectors having a floating structure.SOLUTION: The base unit of a semiconductor testing device includes a vibration surface on which a plurality of connectors having the floating structure are arranged and a vibrator for vibrating the vibration surface on a plane vertical to a fitting direction of the connectors. The vibration surface can be constituted as a floating structure from a base unit body. A vertical vibrator for vibrating the vibration surface in the same direction as the fitting direction of the connectors is also allowed to be included in the base unit. |
申请公布号 |
JP2013160650(A) |
申请公布日期 |
2013.08.19 |
申请号 |
JP20120023256 |
申请日期 |
2012.02.06 |
申请人 |
YOKOGAWA ELECTRIC CORP;YOKOGAWA TEST SOLUTIONS CORP |
发明人 |
TAKAHASHI IKUMITSU |
分类号 |
G01R31/28;H01L21/66 |
主分类号 |
G01R31/28 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|