发明名称 BASE UNIT OF SEMICONDUCTOR TESTING DEVICE AND SEMICONDUCTOR TESTING DEVICE
摘要 PROBLEM TO BE SOLVED: To perform stably connector fitting operation without increasing sizes of connectors in a base unit including the connectors having a floating structure.SOLUTION: The base unit of a semiconductor testing device includes a vibration surface on which a plurality of connectors having the floating structure are arranged and a vibrator for vibrating the vibration surface on a plane vertical to a fitting direction of the connectors. The vibration surface can be constituted as a floating structure from a base unit body. A vertical vibrator for vibrating the vibration surface in the same direction as the fitting direction of the connectors is also allowed to be included in the base unit.
申请公布号 JP2013160650(A) 申请公布日期 2013.08.19
申请号 JP20120023256 申请日期 2012.02.06
申请人 YOKOGAWA ELECTRIC CORP;YOKOGAWA TEST SOLUTIONS CORP 发明人 TAKAHASHI IKUMITSU
分类号 G01R31/28;H01L21/66 主分类号 G01R31/28
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